JPH0397924U - - Google Patents
Info
- Publication number
- JPH0397924U JPH0397924U JP506190U JP506190U JPH0397924U JP H0397924 U JPH0397924 U JP H0397924U JP 506190 U JP506190 U JP 506190U JP 506190 U JP506190 U JP 506190U JP H0397924 U JPH0397924 U JP H0397924U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- reaction chamber
- spherical
- cylindrical
- microwaves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP506190U JPH0397924U (en]) | 1990-01-25 | 1990-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP506190U JPH0397924U (en]) | 1990-01-25 | 1990-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0397924U true JPH0397924U (en]) | 1991-10-09 |
Family
ID=31508781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP506190U Pending JPH0397924U (en]) | 1990-01-25 | 1990-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0397924U (en]) |
-
1990
- 1990-01-25 JP JP506190U patent/JPH0397924U/ja active Pending
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